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Wafer Dimension Specification SEMI−JEIDA 比較表 |
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Wafer Dimension Specification SEMI−JEIDA 比較表 |
| DIAMETER | Dimension Tolerance |
SEMI JEIDA |
50.80 50.00 |
60.00 | 76.20 76.00 |
80.00 | 90.00 90.00 |
100.00 100.00 |
125.00 125.00 |
150.00 150.00 |
200.00 200.00 |
|
| SEMI JEIDA |
0.38 0.5 |
0.5 | 0.63 0.5 |
0.5 | 0.5 0.5 |
0.5 0.5 |
0.2 0.5 |
0.2 0.5 |
0.2 0.5 |
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| THICKNESS | Dimension Tolerance |
SEMI JEIDA |
0.279 0.280 |
0.330 | 0.381 0.380 |
0.400 | 0.475 0.475 |
0.52 0.525 |
0.625 | 0.625 0.625 |
0.675 0.625 |
0.725 0.725 |
| SEMI JEIDA |
0.025 0.010 |
0.015 | 0.025 0.015 |
0.025 | 0.025 0.025 |
0.020 0.015 |
0.020 0.015 |
0.020 0.015 |
0.020 0.025 |
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| PRIMARY FLAT LENGTH | Dimension Tolerance |
SEMI JEIDA |
15.88 17.50 |
20.00 | 22.22 22.00 |
22.00 | 27.00 27.00 |
32.50 32.50 |
42.50 42.50 |
57.50 47.50 |
57.50 57.50 |
|
| SEMI JEIDA |
1.65 2.50 |
2.50 | 3.17 2.50 |
3.00 | 3.00 2.50 |
2.50 2.50 |
2.50 2.50 |
2.50 2.50 |
2.50 2.50 |
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| SECONDARY FLAT LENGTH | Dimension Tolerance |
SEMI JEIDA |
8.00 - |
11.18 - |
11.50 - |
13.50 - |
18.00 - |
27.50 - |
37.50 - |
NO 2nd flat - |
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| SEMI JEIDA |
1.65 - |
1.52 - |
1.50 - |
1.50 - |
2.00 - |
2.50 - |
2.50 - |
- - |
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| BOW MAX | Dimension | SEMI JEIDA |
0.038 | 0.040 | 0.040 | 0.040 | 0.040 | 0.040 | 0.060 | 0.065 | ||
| TOTAL THICKNESS VARIATION | Dimension | SEMI JEIDA |
0.012 0.015 |
0.020 | 0.025 0.025 |
0.025 | 0.025 0.025 |
0.010 0.025 |
0.010 0.025 |
0.010 0.025 |
0.010 0.025 |
|
| EDGE PROFILE COODINATE；Cy | Dimension | SEMI JEIDA |
0.093 | 0.127 | 0.133 | 0.158 | 0.175 | 0.208 | 0.208 | 0.225 | 0.242 | |
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